Here is a subset of ArchiMate (3.x) concepts in the form of meta-model.
Another version with relationship explanations below.
New ArchiMate 3 concepts such as Application Process and Technology Process are included in this meta-model, so that layers are aligned with each other. Now there is a process in each layer to model the behavior, which is related to an active structure element such as application or actor. A “Process” concept can be replaced with “Function” concept (e.g. Business Function, Application Function or Technology Function), which also models the behavior of an active element.
For more detailed ArchiMate meta-models see this link.
For more about ArchiMate modelling, see: