Here is a subset of ArchiMate (3.x) concepts in the form of meta-model.
New ArchiMate 3.x concepts such as Application Process and Technology Process are included in this meta-model, so that layers are aligned with each other. Now there is a process in each layer to model the behavior, which is related to an active structure element such as application or actor. A “Process” concept can be replaced with “Function” concept (e.g. Business Function, Application Function or Technology Function), which also models the behavior of an active element.
Here is another version of the simplified ArchiMate meta-model, enhanced with Motivation elements.